A MEMS Based Electrometer with a Low-Noise Switched Reset Amplifier for Charge Measurement

This video was recorded in 2012 and posted in 2021

Sponsored by IEEE Sensors Council (https://ieee-sensors.org/)

Title: A MEMS Based Electrometer with a Low-Noise Switched Reset Amplifier for Charge Measurement

Author: Gerardo Jaramillo{2}, David Horsley{2}, Cesare Buffa{1}, Giacomo Langfelder{1}

Abstract: Electrostatic charge measurements are at the base of chemical, physical and biological experiments. This work presents an electrometer based on a MEMS structure with improvements on the low-noise readout amplifier by reducing input-referred voltage noise and parasitic capacitances. The electrometer geometry allows for charge output signal measurements at 2fn minimizing feedthrough. Operating at resonance, charge collected on the moving electrode is modulated and the induced voltage is read with a low-leakage very high-input impedance amplifier. Reduction of parasitic capacitance and increase in resolution is achieved through the careful selection and placement of discrete electronic components alongside the silicon MEMS chip.

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